WebOct 5, 2005 · Polyelectrolyte multilayer (PEM) organic thin films with diameters ranging from 80 to 200 nm can be generated from dip‐pen nanolithography (DPN) fabricated templates. Through the use of multi‐pen AFM cantilever probes, parallel fabrication of PEM features with nanoscale resolution can be achieved. Webpascale maury Nanoimprint lithography (NIL) is used as a tool to pattern self-assembled monolayers (SAMs) on silicon substrates because of its ability to pattern in the micrometer and nanometer ranges. The polymer template behaves as a physical barrier preventing the formation of a SAM in the covered areas of the substrate.

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